J. Lu, M. Zia, D. A. Baig, G. Yan, J.J. Kim, K. Nagapudi, P. Anschutz, S. Oh, D. H. O'Connor, S. J. Sober, and M. S. Bakir, "Opto-Myomatrix: μLED integrated microelectrode arrays for optogenetic activation and electrical recording in muscle tissue," bioRxiv, preprint, 2024. doi: 10.1101/2024.07.01.601601.
R. Krishna, A. Victor, S. Penta, X. Chen, M. S. Bakir, N. S. Kim and E. Rosenbaum, "Yield-Aware Interposer Design for UCIe Interconnects," 2024 IEEE 33rd Conference on Electrical Performance of Electronic Packaging and Systems (EPEPS), Toronto, ON, Canada, 2024, pp. 1-3, doi: 10.1109/EPEPS61853.2024.10753661.
C. -H. Kuo, M. Manley, D. Pal, R. Sahay, R. Kanjolia, J. Woodruff, M. S. Bakir, A. C. Kummel, M. Moinpour and J. Spiefelman, "Selective Co ALD for Chiplet-to-Wafer and Wafer-to-Wafer Bonding," 2024 IEEE International Interconnect Technology Conference (IITC), San Jose, CA, USA, 2024, pp. 1-2, doi: 10.1109/IITC61274.2024.10732076.
G. Yan, E. Chung, E. Masselink, S. Oh, M, Zia, B Ramakrishnan, V. Oruganti, H. Alissa, C. Belady, Y. Im, Y. Joshi, and M. S. Bakir., "Toward TSV-Compatible Microfluidic Cooling for 3D ICs," in IEEE Transactions on Components, Packaging and Manufacturing Technology, doi: 10.1109/TCPMT.2024.3516653. (Early Access)
S. Penta, T. Zheng, E. Tremble, A. Chakravarti, A. Sigler, Z. Zhang, C. Benes, M. S. Bakir and W. Sauter, "Performance Evaluation of UCIe-based Die-to-Die Interface on Low-Cost 2D Packaging Technology," 2024 IEEE 74th Electronic Components and Technology Conference (ECTC), Denver, CO, USA, 2024, pp. 274-278, doi: 10.1109/ECTC51529.2024.00052.
A. Kaul, M. Manley, J. Read, S. Yu and M. S. Bakir., "Co-Optimization for Robust Power Delivery Design in 3D-Heterogeneous Integration of Compute In-Memory Accelerators," 2024 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits), Honolulu, HI, USA, 2024, pp. 1-2, doi: 10.1109/VLSITechnologyandCir46783.2024.10631345.
E. Chung, G. Yan, S. Oh, B. Ramakrishnan, H. Alissa, V. Oruganti, C. Belady, and M. S. Bakir., "Electrical–Thermal Co-Analysis of Through-Silicon Vias (TSVs) Integrated Within Micropin-Fin Heatsink for 3-D Heterogeneous Integration (HI)," in IEEE Transactions on Components, Packaging and Manufacturing Technology, vol. 14, no. 10, pp. 1792-1802, Oct. 2024, doi: 10.1109/TCPMT.2024.3452637.
R. Sahay, D. Pal, A. Victor, C.-H. Kuo, M. Manley, H. Simka, A. Kummel and M. S. Bakir, "Inverse Hybrid Bonding with Metal Oxide Framework as Infill for Heterogeneous Integration," 2024 IEEE 74th Electronic Components and Technology Conference (ECTC), Denver, CO, USA, 2024, pp. 1837-1840, doi: 10.1109/ECTC51529.2024.00307.
C. -H. Kuo, D. Pal, V. Wang, M. Manley, R. Sahay, R. Kanjolia, M. Moinpour, J. Woodruff, M. S. Bakir, J. Spiefelman and A. C. Kummel, "Co Metal ALD on Cu with Cyclic Clean by Peroxide and Hydrazine for Inverse Hybrid Metal Bonding," 2024 International VLSI Symposium on Technology, Systems and Applications (VLSI TSA), HsinChu, Taiwan, 2024, pp. 1-2, doi: 10.1109/VLSITSA60681.2024.10546373.
E. Chung, G. Yan, B. Ramakrishnan, H. Alissa, V. Oruganti, C. Belady, E. Masselink , and M. S. Bakir., "Electrical-Thermal Co-analysis of TSV Embedded Microfluidic Pin-fin Heatsink for High Power Dissipation with High Bandwidth Density," 2024 IEEE 74th Electronic Components and Technology Conference (ECTC), Denver, CO, USA, 2024, pp. 1479-1484, doi: 10.1109/ECTC51529.2024.00240.
E. T. Surillo, R. A. Sosa, C. Molina, H. Park, P. Nimbalkar, S. Srirangan, "Bayesian Optimization of Large Glass Package Architecture for System-Level Reliability in High-Performance Computing Applications," 2024 IEEE 74th Electronic Components and Technology Conference (ECTC), Denver, CO, USA, 2024, pp. 246-253, doi: 10.1109/ECTC51529.2024.00047.
J. Sharda, M. Manley, A. Kaul, W. Li, M. Bakir and S. Yu, "Design and Thermal Analysis of 2.5D and 3-D Integrated System of a CMOS Image Sensor and a Sparsity-Aware Accelerator for Autonomous Driving," in IEEE Journal of the Electron Devices Society, vol. 12, pp. 426-432, 2024, doi: 10.1109/JEDS.2024.3354621.
B. Chung, M. Zia, K. A. Thomas, J. A. Michaels, A. Jacob, A. Pack, M. J. Williams, K. Nagapudi, L. H. Teng, E. Arrambide, L. Ouellette, N. Oey, R. Gibbs, P. Anschutz, J. Lu, Y. Wu, M. Kashefi, T. Oya, R. Kersten, A. C. Mosberger, S. O'Connell, R. Wang, H. Marques, A. R. Mendes, C. Lenschow, G. Kondakath, J. J. Kim, W. Olson, K. N. Quinn, P. Perkins, G. Gatto, A. Thanawalla, S. Coltman, T. Kim, T. Smith, B. Binder-Markey, M. Zaback, C. K. Thompson, S. Giszter, A. Person, M. Goulding, E. Azim, N. Thakor, D. O'Connor, B. Trimmer, S. Q. Lima, M. R. Carey, C. Pandarinath, R. M. Costa, J. A. Pruszynski, M. Bakir, S. J. Sober, "Myomatrix arrays for high-definition muscle recording," in eLife, vol. 12, no. RP88551, 2023. [Online]. Available: https://doi.org/10.7554/eLife.88551.3.
A. Kaul, M. O. Hossen, M. Manley and M. S. Bakir, "Design Considerations for Power Delivery Network and Metal-Insulator-Metal Capacitor Integration in Bridge-Chips for 2.5-D Heterogeneous Integration," 2023 IEEE 73rd Electronic Components and Technology Conference (ECTC), Orlando, FL, USA, 2023, pp. 985-990, doi: 10.1109/ECTC51909.2023.00168.
W. Li, M. Manley, J. Read, A. Kaul, M. S. Bakir and S. Yu, "H3DAtten: Heterogeneous 3-D Integrated Hybrid Analog and Digital Compute-in-Memory Accelerator for Vision Transformer Self-Attention," in IEEE Transactions on Very Large Scale Integration (VLSI) Systems, vol. 31, no. 10, pp. 1592-1602, Oct. 2023, doi: 10.1109/TVLSI.2023.3299509.
M. Manley, Z. J. Devereaux, V. Wang, C. Kuo, N. M. K. Linn, A. Kummel, C. H. Winter, and M. S. Bakir, "Towards Selective Cobalt Atomic Layer Deposition for Chip-to-Wafer 3D Heterogeneous Integration," 2023 IEEE 73rd Electronic Components and Technology Conference (ECTC), Orlando, FL, USA, 2023, pp. 374-378, doi: 10.1109/ECTC51909.2023.00069.
J. Sharda, M. Manley, A. Kaul, W. Li, M. Bakir and S. Yu, "Thermal Modeling of 2.5D Integrated Package of CMOS Image Sensor and FPGA for Autonomous Driving," 2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM), Seoul, Korea, Republic of, 2023, pp. 1-3, doi: 10.1109/EDTM55494.2023.10102948.
T. Zheng and M. S. Bakir, "Benchmarking and Demonstration of Low-Loss Fused-Silica Stitch-Chips With Compressible Microinterconnects for RF/mm-Wave Chiplet-Based Modules," in IEEE Transactions on Components, Packaging and Manufacturing Technology, vol. 13, no. 7, pp. 1064-1066, July 2023, doi: 10.1109/TCPMT.2023.3297023.
T. Zheng, M. Manley and M. Bakir, "Embedded mm-Wave Chiplet Based Module using Fused-Silica Stitch-Chip Technology: RF Characterization and Thermal Evaluation," 2023 IEEE 73rd Electronic Components and Technology Conference (ECTC), Orlando, FL, USA, 2023, pp. 1493-1498, doi: 10.1109/ECTC51909.2023.00253.
A. Kaul, Y. Luo, X. Peng, M. Manley, Y.-C. Luo, S. Yu and M. S. Bakir, "3-D Heterogeneous Integration of RRAM-Based Compute-In-Memory: Impact of Integration Parameters on Inference Accuracy," in IEEE Transactions on Electron Devices, vol. 70, no. 2, pp. 485-492, Feb. 2023, doi: 10.1109/TED.2022.3231570.
J. Lu, M. Zia, M. J. Williams, A. L. Jacob, B. Chung, S. J. Sober and M. S. Bakir, "High-performance Flexible Microelectrode Array with PEDOT:PSS Coated 3D Micro-cones for Electromyographic Recording", in 44th International Engineering in Medicine and Biology Conference, Glasgow, United Kingdom, Jul. 2022.
T. Zheng, A. Kaul, S. Kochupurackal Rajan, and M. S. Bakir, "Polylithic Integrated Circuits using 2.5D and 3D Heterogeneous Integration: Electrical and Thermal Design Considerations and Demonstrations," in Embedded and Fan-Out Wafer and Panel Level Packaging Technologies for Advanced Application Spaces, B. Keser, and S. Kröhnert, Eds. Wiley, 2021, pp. 261-287.
J. L. Gonzalez, J. R. Brescia, T. Zheng, S. Kochupurackal Rajan and M. S. Bakir, "A Die-Level, Replaceable Integrated Chiplet (PINCH) Assembly Using a Socketed Platform, Compressible MicroInterconnects, and Self-Alignment," in IEEE Transactions on Components, Packaging and Manufacturing Technology, vol. 11, no. 12, pp. 2069-2076, Dec. 2021.
T. Zheng, P. K. Jo, S. Kochupurackal Rajan and M. S. Bakir, "Electrical Characterization and Benchmarking of Polylithic Integration Using Fused-Silica Stitch-Chips With Compressible Microinterconnects for RF/mm-Wave Applications," in IEEE Transactions on Components, Packaging and Manufacturing Technology, vol. 11, no. 11, pp. 1824-1834, Nov. 2021.
P. Yeon, S. Kochupurackal Rajan, J. Falcone, J. L. Gonzalez, G. S. May, R. V. Bellamkonda, O. Brand, M. S. Bakir, and M. Ghovanloo, "Microfabrication, Coil Characterization, and Hermetic Packaging of Millimeter-Sized Free-Floating Neural Probes," in IEEE Sensors Journal, vol. 21, no. 12, pp. 13837-13848, 15 June, 2021.
X. Peng , W. Chakraborty, A. Kaul, W. Shim, M.S. Bakir, S. Datta, S. Yu, "Benchmarking Monolithic 3D Integration for Compute-in-Memory Accelerators: Overcoming ADC Bottlenecks and Maintaining Scalability to 7nm or Beyond," in Proc. IEEE International Electron Devices Meeting (IEDM), San Francisco, CA, Dec. 2020.
M. -J. Li, M. Breeden, V. Wang, J. Hollin, N. M. K. Linn, C. H. Winter, A. Kummel, and M. S. Bakir, "Cu–Cu Bonding Using Selective Cobalt Atomic Layer Deposition for 2.5-D/3-D Chip Integration Technologies," in IEEE Transactions on Components, Packaging and Manufacturing Technology, vol. 10, no. 12, pp. 2125-2128, Dec. 2020.
T. E. Sarvey, A. Kaul, S. K. Rajan, A. Dasu, R. Gutala, and M. S. Bakir, "Microfluidic Cooling of a 14-nm 2.5-D FPGA With 3-D Printed Manifolds for High-Density Computing: Design Considerations, Fabrication, and Electrical Characterization," IEEE Transactions on Components, Packaging and Manufacturing Technology, vol. 9, no. 12, pp. 2393-2403, 2019.
T. E. Sarvey, Y. Hu, C. E. Green, P. A. Kottke, D. C. Woodrum, Y. K. Joshi, A. G. Fedorov, S. K. Sitaraman, and M. S. Bakir, "Integrated circuit cooling using heterogeneous micropin-fin arrays for nonuniform power maps," IEEE Transactions on Components, Packaging and Manufacturing Technology, vol. 7, no. 10, pp. 1617-1624, Oct.2017
D. Lorenzini, C. Green, T. E. Sarvey, X. Zhang, Y. Hu, A. G. Fedorov, M. S. Bakir, Y. Joshi, "Embedded single phase microfluidic thermal management for non-uniform heating and hotspots using microgaps with variable pin fin clustering," Inter. Jour. of Heat and Mass Transfer, Volume 103, Pages 1359-1370, 2016.
X. Zhang, M. H. Nasr, D. C. Woodrum, C. E. Green, P. A. Kottke, T. E. Sarvey, Y. K. Joshi, S. K. Sitaraman, A. G. Fedorov, and M. S. Bakir, "Design, microfabrication and thermal characterization of the hotspot cooler testbed for convective boiling experiments in extreme-micro-gap with integrated micropin-fins and heat Loss minimization," in IEEE Intersociety Conf. on Thermal and Thermomechanical Phenomena in Electronic Systems (ITHERM), Las Vegas, NV, May 2016.
D. C. Woodrum, X. Zhang, P. A. Kottke, Y. K. Joshi, A. G. Fedorov, M. S. Bakir, and S. K. Sitaraman, "Reliability assessment of hydrofoil-shaped micro-pin fins subjected to high performance coolant," in IEEE The Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems (ITHERM), Las Vegas, NV, May 2016.
Y. Zhang, T. E. Sarvey, Y. Zhang, M. Zia and M. S. Bakir, "Numerical and experimental exploration of thermal isolation in 3D systems using air gap and mechanically flexible interconnects," in IEEE International Interconnect Technology Conf. / Advanced Metallization Conf. (IITC/AMC), San Jose, CA, May. 2016.
P. Asrar, X. Zhang, C. E. Green, P. A. Kottke, T. E. Sarvey, A. G. Fedorov, M. S. Bakir, and Y. K. Joshi, "Flow boiling of R245fa in a microgap with integrated staggered pin fins," in IEEE Intersociety Conf. on Thermal and Thermomechanical Phenomena in Electronic Systems (ITHERM), Las Vegas, NV, May 2016.
M. H. Nasr, C. E. Green, P. E. Kottke, X. Zhang, T. E. Sarvey, Y. K. Joshi, M. S. Bakir, A. G. Fedorov, "Extreme-microgap based hotspot thermal management with refrigerant flow boiling," in IEEE Intersociety Conf. on Thermal and Thermomechanical Phenomena in Electronic Systems (ITHERM), Las Vegas, NV, May 2016.
R. Abbaspour, D. C. Woodrum, P. A. Kottke, T. E. Sarvey, C. E. Green, Y. K. Joshi, A. G. Fedorov, S. K. Sitaraman, and M. S. Bakir, "Combined finned microgap with dedicated extreme-microgap hotspot flow for high performance thermal management," in IEEE Intersociety Conf. on Thermal and Thermomechanical Phenomena in Electronic Systems (ITHERM), Las Vegas, NV, May 2016.
M. Zia, T. Chi, J. Park, A. Su, J. L. Gonzalez, P. K. Jo, M. P. Styczynski, H. Wang, and M. S. Bakir, "A 3D integrated electronic microplate platform for lowcost repeatable biosensing applications," IEEE Transaction on Components, Packaging and Manufacturing Technology, vol. 6, no. 12, pp. 1827-1833, Dec. 2016.
X. Liu, P. Thadesar, C. Taylor, M. Kunz, N. Tamura, M. Bakir, and S. Sitaraman, "Experimental stress characterization and numerical simulation for copper pumping analysis of through silicon vias (Invited)," IEEE Transaction on Components, Packaging and Manufacturing Technology, vol. 6, no. 7, pp. 993-999, July 2016
. M. Zia, C. Zhang, P. Thadesar, T. Hookway, T. Chi, J. Gonzalez, T. McDevitt, H. Wang, and M. S. Bakir, "Fabrication of and cell growth on silicon membranes with high density TSVs for bio-sensing applications," in Proc. IEEE Biomedical Circuits and Systems Conference (BioCAS), Atlanta, GA, Oct. 2015.
C. E. Green, P. E. Kottke, T. E. Sarvey, A. G. Federov, Y. Joshi, M. S. Bakir, "Performance and integration implications of addressing localized hotspots through two approaches: clustering of micro pin-fins and dedicated microgap coolers," in Proc. Int. Tech. Conf. and Expo. Packaging and Integration of Electronic and Photonic Microsystems and Int. Conf. Nanochannels, Microchannels, and Minichannels (InterPACKICNMM), San Francisco, CA, July 2015.
. X. Zhang, X. Han, T. E. Sarvey, C. E. Green, P. A. Kottke, A. G. Fedorov, Y. Joshi, and M. S. Bakir, "3D IC with embedded microfluidic cooling: technology, thermal performance, and electrical implications," in Proc. Int. Tech. Conf. and Expo. Packaging and Integration of Electronic and Photonic Microsystems and Int. Conf. Nanochannels, Microchannels, and Minichannels (InterPACKICNMM), San Francisco, CA, July 2015.
H. S. Yang, C. Zhang, and M. Bakir, "Self-aligned silicon interposer tiles and silicon bridges using positive self-alignment structures and rematable mechanically flexible interconnects", IEEE Transaction on Components, Packaging and Manufacturing Technology, vol. 4, no. 11, pp. 1760-1768, Nov. 2014.
H. Oh, Y. Zhang, L. Zheng, and M. Bakir,"Electrical interconnect and microfluidic cooling within 3D ICs and silicon interposer," in Proc. Int. Tech. Conf. and Expo. Packaging and Integration of Electronic and Photonic Microsystems and Int. Conf. Nanochannels, Microchannels, and Minichannels (InterPACKICNMM), Chicago, IL, Aug. 2014.
V. Kumar, R. Sharma, E. Uzunlar, L. Zheng, R. Bashirullah, P. Kohl, M. S. Bakir, and A. Naeemi, "Airgap interconnects: modeling, optimization, and benchmarking for backplane, PCB, and interposer applications," IEEE Transaction on Components, Packaging and Manufacturing Technology, vol.4, no.8, pp.1335-1346, Aug. 2014.
P. Thadesar, J. M. Gu, A. Dembla, S. J. Hong, G. S. May and M. S. Bakir, "Novel photodefined polymer-clad through-silicon via technology integrated with end point detection using optical emission spectroscopy," in Proc. 24th Annual SEMI Advanced Semiconductor Manufacturing Conf. (ASMC), Saratoga Springs, NY, May 2013.
B. Dang, P. J. Joseph, X. Wei, M. S. Bakir, P. A. Kohl, Y. K. Joshi, and J. D. Meindl, "A Chip-Scale Cooling Scheme With Integrated Heat Sink and Thermal-Fluidic I/O Interconnects," in ASME 2005 Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems collocated with the ASME 2005 Heat Transfer Summer Conference, 2005, vol. Advances in Electronic Packaging, Parts A, B, and C, pp. 605-610, doi: 10.1115/ipack2005-73416.
M. S. Bakir, B. Dang, R. Emery, G. Vandentop, K. P. Martin, P. A. Kohl, and J. D. Meindl, "Chip integration of sea of leads compliant I/O interconnections for the ultimate enabling of chips with low-k interlayer dielectrics," in 2004 Proceedings. 54th Electronic Components and Technology Conference (IEEE Cat. No. 04CH37546), 2004, vol. 1: IEEE, pp. 1167-1173.
M. S. Bakir, R. A. Villalaz, O. O. Ogunsola, T. K. Gaylord, P. A. Kohl, K. P. Martin, and J. D. Meindl, "Sea of polymer pillars: Dual-mode electrical-optical input/output interconnections," in Proceedings of the IEEE 2003 International Interconnect Technology Conference (Cat. No. 03TH8695), 2003: IEEE, pp. 77-79.
A. Mule, M. S. Bakir, J. Jayachandran, R. Villalaz, H. Reed, N. Agrawal, S. Ponoth, J. Plawsky, P. Persans, P. Kohl, K. Martin, E. Glytsis, T. Gaylord, and J. Meindl, "Optical waveguides with embedded air-gap cladding integrated within a sea-of-leads (SoL) wafer-level package," in Proceedings of the IEEE 2002 International Interconnect Technology Conference (Cat. No. 02EX519), 2002: IEEE, pp. 122-124.
M. S. Bakir, H. A. Reed, A. V. Mule, P. A. Kohl, K. P. Martin, and J. D. Meindl, "Sea of Leads (SoL) characterization and design for compatibility with board-level optical waveguide interconnection," in Proceedings of the IEEE 2002 Custom Integrated Circuits Conference (Cat. No. 02CH37285), 2002: IEEE, pp. 491-494.
J. D. Meindl, R. Venkatesan, J. A. Davis, J. Joyner, A. Naeemi, P. Zarkesh-Ha, M. S. Bakir, T. Mule, P. A. Kohl, and K. P. Martin, "Interconnecting device opportunities for gigascale integration (GSI)," in International Electron Devices Meeting. Technical Digest (Cat. No. 01CH37224), 2001: IEEE, pp. 23.1. 1-23.1. 4.
H. A. Reed, M. S. Bakir, C. S. Patel, K. P. Martin, J. D. Meindl, and P. A. Kohl, "Compliant wafer level package (CWLP) with embedded air-gaps for sea of leads (SoL) interconnections," in Proceedings of the IEEE 2001 International Interconnect Technology Conference (Cat. No. 01EX461), 2001: IEEE, pp. 151-153.