@inproceedings{gu2013endpoint,
  title={Endpoint detection using optical emission spectroscopy in TSV fabrication},
  author={Gu, Ja Myung and Thadesar, Paragkumar A and Dembla, Ashish and Hong, Sang Jeen and Bakir, Muhannad S and May, Gary S},
  booktitle={2013 IEEE International Interconnect Technology Conference-IITC},
  pages={1--3},
  year={2013},
  organization={IEEE}
}