Biography
- MS in Electrical and Computer Engineering, Georgia Institute of Technology
- BS in Electrical and Computer Engineering, VIT Vellore, India
Research Interests
- 2.5D/3D Heterogeneous Integration
- Direct copper bonding
Thesis SAHAY-THESIS-2024.pdf
All Publications
C. -H. Kuo, M. Manley, D. Pal, R. Sahay, R. Kanjolia, J. Woodruff, M. S. Bakir, A. C. Kummel, M. Moinpour and J. Spiefelman, "Selective Co ALD for Chiplet-to-Wafer and Wafer-to-Wafer Bonding," 2024 IEEE International Interconnect Technology Conference (IITC), San Jose, CA, USA, 2024, pp. 1-2, doi: 10.1109/IITC61274.2024.10732076.
R. Sahay, D. Pal, A. Victor, C.-H. Kuo, M. Manley, H. Simka, A. Kummel and M. S. Bakir, "Inverse Hybrid Bonding with Metal Oxide Framework as Infill for Heterogeneous Integration," 2024 IEEE 74th Electronic Components and Technology Conference (ECTC), Denver, CO, USA, 2024, pp. 1837-1840, doi: 10.1109/ECTC51529.2024.00307.
C. -H. Kuo, D. Pal, V. Wang, M. Manley, R. Sahay, R. Kanjolia, M. Moinpour, J. Woodruff, M. S. Bakir, J. Spiefelman and A. C. Kummel, "Co Metal ALD on Cu with Cyclic Clean by Peroxide and Hydrazine for Inverse Hybrid Metal Bonding," 2024 International VLSI Symposium on Technology, Systems and Applications (VLSI TSA), HsinChu, Taiwan, 2024, pp. 1-2, doi: 10.1109/VLSITSA60681.2024.10546373.